“Micro Electro Mechanical Systems（MEMS）” represents one of the biggest breakthroughs in the area of mechanical and electronic technology occurring in recent years. It is one of the hot subject in the whole world now. This covers the following aspects as overview of MEMS and Microsystems, working principles of Microsystems, operating principles, characteristic, and application of typical MEMS sensors and MEMS actuators, engineering science for microsystem design, fabrication, and packaging, scaling laws in miniaturization, and materials for MEMS and microsystems, and design and analysis of compliant mechanism of MEMS.
By means of class lecture, discussing, visiting and practice etc. “Micro-electromechanical System” can expand students’ sphere of knowledge, pioneered students’ vision and design ability. It aims at cultivating students’ ability to acquire update information in the field of microsystem.
